5 Pieces/Pack 3μm Interdigitated Electrodes Silicon Substrate Interdigitated Capacitor Arrays High-Accuracy Sputter Gold MEMS Medical Biological Optical Sensor Chip (4mm X 6.5mm)

This high precision monocrystalline silicon interdigitated electrode is widely used in chemical, physical and medical sensors, with reliable performance and stable quality! 1. The overall size: 4mm*6.5mm. 2. The line Width: 5μm; The line space: 3μm. 3. The substrate is P-type monocrystalline silicon with 300nm thickness of SiO2 on the surface of the silicon wafer.The Thickness of the substrate is 0.52mm 4. The conductor layer structure: Ti/Au, the thickness are 30nm and 100nm respectively. 5. The suitable temperature for using is from -100 degrees Celsius to +400 degrees Celsius. 6. The resistance of electrode is more than 100T ohm (room temperature, humidity 64%). We offer all kinds of interdigitated electrodes, various sizes, various shapes, various substrate, various line spaces and various proceeds (Electroplating, MEMS, Thick film, Printing). Beside of the listing products, We can customize interdigitated electrodes according your needs. Please do not hesitate to contact us, if you have any requirments or questions.

• 1. Packing Included: 5 Pieces of 3μm interdigitated electrodes.
• 2. The substrate: P-type monocrystalline silicon with 300nm thickness of SiO2 on the surface of the silicon wafer. The size of the substrate is 6.5mm X 4mm X 0.52mm. The conductor layer structure: Ti/Au, the thickness are 30nm and 100nm respectively.
• 3. The line width is 5μm, and the line space is 3μm. Finger Length: 1600μm; Number of interdigitate pairs : 75(150 fingers).
• 4. The suitable temperature for using is from - 100 degrees Celsius to +400 degrees Celsius.
• 5. The electrode has large pads, so bonding and soldering are easy. This product can be used as core part of biological, medical and optical sensors.